Lam Research introduces deposition technique to enable next-gen MEMS and RF filters for 5G applications

Lam Research Corporation, a supplier of wafer-fabrication equipment and related services to the semiconductor industry, has launched Pulsus, a production-oriented pulsed laser deposition (PLD) tool designed to help produce next-generation MEMS-based microphones and radio frequency (RF) filters.

This tool is expected to improve performance and capabilities in consumer electronics and automotive technology.

With the addition of Pulsus, the company has expanded its range of deposition, etch, and single-wafer clean products for specialty technologies.

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