Advancing MEMS SAW Gas Pressure Sensor Design with SIMULIA Abaqus and CST Studio Suite

MicroElectroMechanical Systems (MEMS) have revolutionized the semiconductor market since their development in the early 1990s, now accounting for approximately 20% of the global market. Among these, Surface Acoustic Wave (SAW) devices stand out for their exceptional sensitivity and versatility in sensing applications. Our latest simulation study, utilizing SIMULIA Abaqus and SIMULIA CST Studio Suite, examines the performance analysis of a MEMS SAW gas pressure sensor, demonstrating a robust multiphysics simulation workflow.